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Thin
Film& Tools Division |
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Ò»¡¢ Evaporation material |
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1. Precise Optic Evaporation material
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- High refractive: Ta2O5, Ti3O5, TiO2, Nb2O5, ZrO2
- Low refractive: SiO2, MgF2
- Assisted System: Mo-Grid for Ion Source
LaB6
for Leybold APS
- Spare parts: Crystal¡¢Crucible¡¢Electron Bean Filament
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2.Flat
Display£½£¾ITO, Si, Nb, Ta Target |
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3.Semiconductor£½£¾Au,
Ag, Ni, Cr, Ti, Al, Pt |
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4.Disc£½£¾Al
target, Mask, Shield |
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5.Product
Catalog |
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6.Spec.
of Evaporation material |
| ¶þ¡¢Tools
Division |
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1.Precise
Optic Evaporation material£½£¾ Optorun,
Leybold, Showa, Shincron,
Veeco
High-level Evaporation Device |
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2.LED£½£¾MOCVD,
Chip Process, Measuring
Sorter Device |
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3.Semiconductor£½£¾Exposure,
Developer, Etching,
PVD, CVD,
Ion Implantation ,
Polishing,
Measuring Sorter Device |
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